FLUID CONTROL DEVICE

WIPO Patent Application WO/2016/013390

A1

Provided is a fluid control device capable of configuring a compact active valve at low cost and easily timing operations of the active valve and a pump even when a high-frequency drive is performed. A fluid control device (10) is provided with a casing (11) that has a pump chamber (15) and a first flow channel hole (16) communicated with the pump chamber (15), a vibration unit (12) that generates a variation in inner pressure in the pump chamber (15) by vibrating, a valve element (13) that is supported so as to be freely elastically displaced between a position near an opening portion of the first flow channel hole (16) and a position far from the opening portion of the first flow channel hole (16), and a control unit (14) that switches a drive frequency of the vibration unit (12) between a low-frequency side frequency with respect to a structural resonance frequency of the valve element (13) and a high-frequency side frequency with respect to the structural resonance frequency of the valve element (13).

JP2023079220	ELECTROOSMOTIC PUMP, ELECTRODE MANUFACTURING METHOD, FLUID PUMPING SYSTEM USING THE SAME, AND OPERATION METHOD OF THAT SYSTEM
JP2006194181	DIAPHRAGM PUMP
JPH06299970	ELECTROMAGNETICALLY OPERATED DIAPHRAGM TYPE AIR PUMP

WADA HIROAKI (JP)
KURIHARA KIYOSHI (JP)
KONDO DAISUKE (JP)

PCT/JP2015/069393

January 28, 2016

July 06, 2015

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MURATA MANUFACTURING CO (JP)

F04B45/047; F04B39/10; F04B45/04

JP2009203822A	2009-09-10
JP2008248698A	2008-10-16
US6109889A	2000-08-29
JP2012107636A	2012-06-07
JP2012528980A	2012-11-15
JPH10511165A	1998-10-27

Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)

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