Title:
FLUID CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/168872
Kind Code:
A1
Abstract:
[Problem] To provide a fluid control device which, while achieving greater compactness, internally accommodates a member for detecting abnormalities in the fluid control device. Further, to facilitate externally verifying the result of irregularity detection in the fluid control device.
[Solution] This fluid control device 1 is provided with an information processing module 5 provided inside the device, a valve body 11 provided with a flow path, an actuator body 12 fixed to the valve body 11, a hollow casing 13 fixed to the actuator body 12 and having a through-hole 133d formed in the side surface, a piston 126 provided inside of the actuator body 12 and comprising a drive pressure introduction path 126b formed internally that communicates with a drive pressure introduction chamber S2, and an introduction pipe 21 for introducing drive pressure, with one end inserted into the drive pressure introduction path 126b and the other end drawn from the through-hole 133d in the casing 13 to the outside.
Inventors:
SUZUKI YUYA (JP)
KOMEHANA KATSUNORI (JP)
OCHIISHI MASAHIKO (JP)
HARADA AKIHIRO (JP)
TANNO RYUTARO (JP)
SHINOHARA TSUTOMU (JP)
KOMEHANA KATSUNORI (JP)
OCHIISHI MASAHIKO (JP)
HARADA AKIHIRO (JP)
TANNO RYUTARO (JP)
SHINOHARA TSUTOMU (JP)
Application Number:
PCT/JP2018/009792
Publication Date:
September 20, 2018
Filing Date:
March 13, 2018
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
F16K31/122; F16K7/17; F16K37/00
Foreign References:
| JP2001271961A | 2001-10-05 | |||
| JP2016517943A | 2016-06-20 |
Attorney, Agent or Firm:
KASUKAWA Toshio (JP)
Download PDF:
Previous Patent: POLYOLEFIN MICROPOROUS MEMBRANE
Next Patent: OPERATION ANALYSIS SYSTEM OF FLUID CONTROL DEVICE, METHOD, AND COMPUTER PROGRAM
Next Patent: OPERATION ANALYSIS SYSTEM OF FLUID CONTROL DEVICE, METHOD, AND COMPUTER PROGRAM