Title:
FLUID CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/021948
Kind Code:
A1
Abstract:
In order to use a heater to optimally supply a starting material, this fluid control device (100) is equipped with a fluid heating unit (1) provided with a flow path or a fluid housing portion in the interior thereof, and a heater (10) for heating the fluid heating unit, wherein the heater is provided with a heating element (10a) and a metal heat transfer member (10b) thermally connected to the heating element and disposed in a manner surrounding the fluid heating unit, and the surface of the heat transfer member that faces the fluid heating unit includes a surface (S1) which has been subjected to surface treatment for improving heat dissipation.
Inventors:
HIDAKA ATSUSHI (JP)
NAKATANI TAKATOSHI (JP)
NAKATSUJI KEISUKE (JP)
HIRAO KEIJI (JP)
MINAMI YUKIO (JP)
IKEDA NOBUKAZU (JP)
NAKATANI TAKATOSHI (JP)
NAKATSUJI KEISUKE (JP)
HIRAO KEIJI (JP)
MINAMI YUKIO (JP)
IKEDA NOBUKAZU (JP)
Application Number:
PCT/JP2018/027233
Publication Date:
January 31, 2019
Filing Date:
July 20, 2018
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
C23C16/448; H01L21/31; H05B3/00
Domestic Patent References:
| WO2013160812A1 | 2013-10-31 |
Foreign References:
| JP2009252760A | 2009-10-29 | |||
| JP2015023018A | 2015-02-02 | |||
| JP2007250448A | 2007-09-27 | |||
| JP2014114463A | 2014-06-26 | |||
| JP2015045340A | 2015-03-12 | |||
| JPH0428193A | 1992-01-30 |
Attorney, Agent or Firm:
TANIDA Ryuichi et al. (JP)
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