Title:
FLUID CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/230189
Kind Code:
A1
Abstract:
This fluid control device (10) is provided with: a case (200) which comprises a case top plate (220) having a first vent hole (251), a case side plate (230), and a case bottom plate (210) having a second vent hole (260); a pump body (100); and a holding member (300) which holds the pump body (100) with respect to the case (200). The pump body (100) is provided with a first main plate (110), a second main plate (120) which is opposite of one principle surface of the first main plate (110), a side plate (130), and a drive member (115) which is arranged on the first main plate (110). The first main plate (110) has multiple first openings (101) arranged annularly. The second main plate (120) has a second opening (102) which is arranged nearer to the case top plate (220) than to the first main plate (110) and which is in a position overlapping the first vent hole (251) in planar view.
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Inventors:
TANAKA NOBUHIRA (JP)
Application Number:
PCT/JP2019/015015
Publication Date:
December 05, 2019
Filing Date:
April 04, 2019
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
F04B45/04; F04B45/047
Domestic Patent References:
| WO2014024608A1 | 2014-02-13 | |||
| WO2017038565A1 | 2017-03-09 |
Foreign References:
| JP2017521181A | 2017-08-03 |
Attorney, Agent or Firm:
KAEDE PATENT ATTORNEYS' OFFICE (JP)
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