Title:
FLUID CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/044827
Kind Code:
A1
Abstract:
[Problem] To provide a fluid control device capable of accurately detecting leakage of a fluid even when the leakage is slight.
[Solution] A fluid control device (V1) having: a valve body (1) in which a flow passage is formed; a diaphragm (22) separating a closed space (S2) from the flow passage; a bonnet (24), which forms the closed space (S2) with the diaphragm, and is provided with a through-hole (241a) which communicates with the closed space (S2) and in which a diaphragm presser (23) is inserted so as to be capable of moving up and down; the diaphragm presser (23), which moves up and down inside the through-hole (241a) and presses against the diaphragm (22), and is provided with an enlarged-diameter section (232) that prevents the diaphragm presser from being extracted from the through-hole (241a); a pressure sensor (P) for detecting pressure inside the closed space (S2); and an elastic body (6), which is interposed between the enlarged-diameter section (232) of the diaphragm presser (23) and the bonnet (24) in the closed space (S2), and which elastically expands and contracts between the enlarged-diameter section (232) of the diaphragm presser (23) and the bonnet (24) in conjunction with the up and down movement of the diaphragm presser (23).
Inventors:
TANNO RYUTARO (JP)
SHINOHARA TSUTOMU (JP)
SUZUKI YUYA (JP)
KISO HIDENORI (JP)
WATANABE YOSHIAKI (JP)
SHINOHARA TSUTOMU (JP)
SUZUKI YUYA (JP)
KISO HIDENORI (JP)
WATANABE YOSHIAKI (JP)
Application Number:
PCT/JP2019/027964
Publication Date:
March 05, 2020
Filing Date:
July 16, 2019
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
F16K37/00; F16K7/12; G01M3/26
Domestic Patent References:
| WO2018150949A1 | 2018-08-23 |
Foreign References:
| JPS59147234A | 1984-08-23 |
Attorney, Agent or Firm:
KASUKAWA Toshio (JP)
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