Title:
FLUID CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/070638
Kind Code:
A1
Abstract:
A fluid control device (10) is provided with a pump (20) and an outer casing (40) containing the pump (20) therein. The outer casing (40) is provided with a first outer wall which forms an internal space (101) on a flat plate (21) side of the pump (20) and which has a through hole (51) for causing the internal space (101) and an external space to communicate to each other. The first outer wall is provided with: an outer wall main plate (41) opposed to a piezoelectric element (30); and a side plate (431) connected to the outer wall main plate (41) and having the through hole (51). The outer wall main plate (41) has higher thermal conductivity than a second outer wall.
Inventors:
TANAKA NOBUHIRA (JP)
KAWABATA YUTOKU (JP)
ACHIWA HIROKI (JP)
KAWABATA YUTOKU (JP)
ACHIWA HIROKI (JP)
Application Number:
PCT/JP2021/029967
Publication Date:
April 07, 2022
Filing Date:
August 17, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
F04B45/04; F04B45/047
Domestic Patent References:
| WO2017038565A1 | 2017-03-09 | |||
| WO2017038565A1 | 2017-03-09 |
Foreign References:
| JP2020020283A | 2020-02-06 |
Attorney, Agent or Firm:
KAEDE PATENT ATTORNEYS' OFFICE (JP)
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