Title:
FLUID CONTROLLING MICRODEVICE AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
WIPO Patent Application WO/1993/020351
Kind Code:
A1
Abstract:
A fluid controlling microdevice, such as a micropump or a microvalve, wherein a stepped portion (7) is provided on an intermediate base member (1) so that a height ratio of an upper chamber (8) to a lower chamber (9) which constitute parts of a flow passage becomes t2/t1=0.2-5.0.
Inventors:
MIYAZAKI HAJIME (JP)
NOSE YASUTO (JP)
ARAKAWA KATSUJI (JP)
SHIMIZU NOBUO (JP)
MURANAKA TSUKASA (JP)
NOSE YASUTO (JP)
ARAKAWA KATSUJI (JP)
SHIMIZU NOBUO (JP)
MURANAKA TSUKASA (JP)
Application Number:
PCT/JP1993/000413
Publication Date:
October 14, 1993
Filing Date:
April 01, 1993
Export Citation:
Assignee:
SEIKO EPSON CORP (JP)
MIYAZAKI HAJIME (JP)
NOSE YASUTO (JP)
ARAKAWA KATSUJI (JP)
SHIMIZU NOBUO (JP)
MURANAKA TSUKASA (JP)
MIYAZAKI HAJIME (JP)
NOSE YASUTO (JP)
ARAKAWA KATSUJI (JP)
SHIMIZU NOBUO (JP)
MURANAKA TSUKASA (JP)
International Classes:
F04B43/04; F04B53/10; F15C5/00; F16K99/00; (IPC1-7): F04B43/04
Foreign References:
| JPH03505771A | 1991-12-12 | |||
| JP4501449A | ||||
| JP4502796A | ||||
| JPS5440504U | 1979-03-17 | |||
| JPS584781U | 1983-01-12 |
Other References:
See also references of EP 0587912A4
Attorney, Agent or Firm:
Kimura, Saburo (19-10 Toranomon 1-chom, Minato-ku Tokyo 105, JP)
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