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Title:
FLUID CONTROLLING MICRODEVICE AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
WIPO Patent Application WO/1993/020351
Kind Code:
A1
Abstract:
A fluid controlling microdevice, such as a micropump or a microvalve, wherein a stepped portion (7) is provided on an intermediate base member (1) so that a height ratio of an upper chamber (8) to a lower chamber (9) which constitute parts of a flow passage becomes t2/t1=0.2-5.0.

Inventors:
Miyazaki, Hajime (Seiko Epson Corporation, 3-5 Owa 3-chom, Suwa-shi Nagano 392, JP)
Nose, Yasuto (Seiko Epson Corporation, 3-5 Owa 3-chom, Suwa-shi Nagano 392, JP)
Arakawa, Katsuji (Seiko Epson Corporation, 3-5 Owa 3-chom, Suwa-shi Nagano 392, JP)
Shimizu, Nobuo (Seiko Epson Corporation, 3-5 Owa 3-chom, Suwa-shi Nagano 392, JP)
Muranaka, Tsukasa (Seiko Epson Corporation, 3-5 Owa 3-chom, Suwa-shi Nagano 392, JP)
Application Number:
PCT/JP1993/000413
Publication Date:
October 14, 1993
Filing Date:
April 01, 1993
Export Citation:
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Assignee:
SEIKO EPSON CORPORATION (4-1 Nishishinjuku 2-chome, Shinjuku-ku, Tokyo 163, JP)
Miyazaki, Hajime (Seiko Epson Corporation, 3-5 Owa 3-chom, Suwa-shi Nagano 392, JP)
Nose, Yasuto (Seiko Epson Corporation, 3-5 Owa 3-chom, Suwa-shi Nagano 392, JP)
Arakawa, Katsuji (Seiko Epson Corporation, 3-5 Owa 3-chom, Suwa-shi Nagano 392, JP)
Shimizu, Nobuo (Seiko Epson Corporation, 3-5 Owa 3-chom, Suwa-shi Nagano 392, JP)
Muranaka, Tsukasa (Seiko Epson Corporation, 3-5 Owa 3-chom, Suwa-shi Nagano 392, JP)
International Classes:
F04B43/04; F04B53/10; F15C5/00; F16K99/00; (IPC1-7): F04B43/04
Foreign References:
JPH03505771A1991-12-12
JP4501449A
JP4502796A
JPS5440504U1979-03-17
JPS584781U1983-01-12
Other References:
See also references of EP 0587912A4
Attorney, Agent or Firm:
Kimura, Saburo (The 6th Central Bldg. 6F, 19-10 Toranomon 1-chom, Minato-ku Tokyo 105, JP)
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