Title:
FLUID DEVICE AND FLOW PATH SUPPLY SYSTEM
Document Type and Number:
WIPO Patent Application WO/2019/130558
Kind Code:
A1
Abstract:
Provided is a fluid device provided with a substrate and a gas-liquid separation filter. The substrate is provided with a flow path through which a solution flows, a reservoir in which the solution is accommodated and which is connected to the flow path, an injection hole that links the reservoir to the outside, and an air introduction hole that branches from the injection hole and is linked to the outside. The gas-liquid separation filter is positioned partway along a path of the air introduction hole, the gas-liquid separation membrane allowing the passage of a gas flowing through the air introduction hole and suppressing the passage of a liquid flowing through the air introduction hole.
Inventors:
ISHIZAWA NAOYA (JP)
UENO TARO (JP)
KOBAYASHI RYO (JP)
TAKASAKI TETSUOMI (JP)
UENO TARO (JP)
KOBAYASHI RYO (JP)
TAKASAKI TETSUOMI (JP)
Application Number:
PCT/JP2017/047282
Publication Date:
July 04, 2019
Filing Date:
December 28, 2017
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G01N35/08; G01N37/00
Domestic Patent References:
| WO2017213123A1 | 2017-12-14 | |||
| WO2017094674A1 | 2017-06-08 |
Foreign References:
| JP2010008058A | 2010-01-14 | |||
| JP2013148591A | 2013-08-01 | |||
| JP2013130548A | 2013-07-04 |
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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