Title:
FLUID DEVICE, SYSTEM, AND MIXING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/003538
Kind Code:
A1
Abstract:
The present invention provides a fluid device that can easily acquire solutions of different concentrations. This fluid device is provided with: first and second substrates that are laminated in the thickness direction; a stock solution introduction flow passage that has a stock solution inlet and comprises a groove provided to at least one of the first and second substrates; a first circulation flow passage comprising an annular groove having a shared section which is a partial flow passage shared with the stock solution introduction flow passage and having a non-shared section which is not shared with the stock solution introduction flow passage and which is connected to a dilute solution inlet; a second circulation flow passage that is provided independently of the first circulation flow passage, and that comprises an annular groove having a shared section which a partial flow passage shared with the stock solution introduction flow passage and having a non-shared section which is not shared with the stock solution introduction flow passage and which is connected to the dilute solution inlet; and/or a third circulation flow passage that comprises an annular groove having a shared flow passage which is a partial flow passage shared with the first circulation flow passage and having a non-shared flow passage which is not shared with the first circulation flow passage and which is connected to the dilute solution inlet, wherein the stock solution introduction flow passage is provided with valves at both ends of the shared section.
Inventors:
KOBAYASHI RYO (JP)
SHIONO HIROFUMI (JP)
SHIONO HIROFUMI (JP)
Application Number:
PCT/JP2018/024945
Publication Date:
January 02, 2020
Filing Date:
June 29, 2018
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G01N35/08; G01N1/38; G01N37/00
Domestic Patent References:
| WO2015046263A1 | 2015-04-02 | |||
| WO2017213123A1 | 2017-12-14 |
Foreign References:
| JP2014038018A | 2014-02-27 |
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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