Title:
FLUID DEVICE AND USE THEREOF
Document Type and Number:
WIPO Patent Application WO/2019/146102
Kind Code:
A1
Abstract:
This fluid device is provided with a flow path, a first compartment valve and a second compartment valve which are arranged in the flow path and which define a prescribed region of the flow path by closing, and a first diaphragm member and a second diaphragm member which are arranged between the first compartment valve and the second compartment valve and which form at least a portion of a flow path wall in the flow path. In a state in which the first compartment valve and the second compartment valve are closed, at least one of the first diaphragm member and the second diaphragm member is deformable.
Inventors:
HAYASHI KOHMA (JP)
TOJI YOSUKE (JP)
UENO TARO (JP)
KOBAYASHI RYO (JP)
LI YONGBO (JP)
TOJI YOSUKE (JP)
UENO TARO (JP)
KOBAYASHI RYO (JP)
LI YONGBO (JP)
Application Number:
PCT/JP2018/002692
Publication Date:
August 01, 2019
Filing Date:
January 29, 2018
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G01N35/08; G01N37/00
Domestic Patent References:
| WO2016153006A1 | 2016-09-29 |
Foreign References:
| JP2004533605A | 2004-11-04 | |||
| JP2016200599A | 2016-12-01 | |||
| JP2010538265A | 2010-12-09 |
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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