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Patent Searching and Data


Title:
FLUID DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/213129
Kind Code:
A1
Abstract:
This fluid device is provided with: a flow passage through which a liquid flows; and a tank that is connected to the flow passage and that stores the liquid. The tank is provided with: an exhaust port through which a gas is discharged; a gas-liquid separation filter that suppresses out-flow of the liquid through the exhaust port; and an absorbent that is arranged inside the tank and that absorbs the liquid.

Inventors:
ISHIZAWA Naoya (15-3 Konan 2-chome, Minato-k, Tokyo 90, 〒1086290, JP)
TOMINAGA Naoko (15-3 Konan 2-chome, Minato-k, Tokyo 90, 〒1086290, JP)
UENO Taro (15-3 Konan 2-chome, Minato-k, Tokyo 90, 〒1086290, JP)
Application Number:
JP2017/020957
Publication Date:
December 14, 2017
Filing Date:
June 06, 2017
Export Citation:
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Assignee:
NIKON CORPORATION (15-3, Konan 2-chome Minato-k, Tokyo 90, 〒1086290, JP)
International Classes:
G01N35/08; B01D71/36; B81B1/00; G01N37/00
Attorney, Agent or Firm:
SHIGA Masatake et al. (1-9-2, Marunouchi Chiyoda-k, Tokyo 20, 〒1006620, JP)
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