Title:
FLUID DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/116474
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a fluid device that is capable of stably supplying a solution from a reservoir without bubbles advancing beyond liquid. The present invention comprises a flow path into which a solution is introduced and a reservoir for accommodating the solution and supplying the solution to the flow path. The length of the reservoir in the direction in which the solution flows toward the flow path is longer than the width orthogonal to the length. The reservoir is formed with a width and depth based on a capillary length calculated from the surface tension and density of the solution and from the acceleration, including that caused by gravity, applied to the solution.
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Inventors:
ICHIKI TAKANORI (JP)
KOBAYASHI RYO (JP)
UENO TARO (JP)
KOBAYASHI RYO (JP)
UENO TARO (JP)
Application Number:
PCT/JP2017/044789
Publication Date:
June 20, 2019
Filing Date:
December 13, 2017
Export Citation:
Assignee:
UNIV TOKYO (JP)
NIKON CORP (JP)
NIKON CORP (JP)
International Classes:
G01N35/08; B01J19/00; B81B1/00; G01N37/00
Domestic Patent References:
WO2016153006A1 | 2016-09-29 | |||
WO2016153000A1 | 2016-09-29 | |||
WO2015046263A1 | 2015-04-02 |
Foreign References:
JP2008134126A | 2008-06-12 | |||
JP2005065607A | 2005-03-17 | |||
JP2004151109A | 2004-05-27 | |||
JP2009121984A | 2009-06-04 | |||
JP2009133805A | 2009-06-18 | |||
JP2008082961A | 2008-04-10 | |||
US20120270331A1 | 2012-10-25 | |||
US20110020459A1 | 2011-01-27 | |||
JP2008522795A | 2008-07-03 | |||
JP2010539511A | 2010-12-16 |
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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