Title:
FLUID FLOW CONTROL SYSTEM AND METHOD
Document Type and Number:
WIPO Patent Application WO2006017147
Kind Code:
B1
Abstract:
A fluid flow control system including a subassembly having a plurality of fluid flow component bases coupled with at least one fluid conduit to define a fluid flow path. The system further includes fluid flow components that are configured to couple selective fluid flow component bases on the subassembly such that the fluid flow components are in fluid communication with each other along the fluid flow path. The system also includes a channel block having a recess, wherein the fluid flow component bases are configured to be at least partially nested within the recess.
Inventors:
LEYS JOHN A (US)
Application Number:
PCT/US2005/024186
Publication Date:
December 14, 2006
Filing Date:
July 11, 2005
Export Citation:
Assignee:
ENTEGRIS INC (US)
LEYS JOHN A (US)
LEYS JOHN A (US)
International Classes:
F16K11/10
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