Title:
FLUID PRESSURE IMPRINTING DEVICE AND PRESSURIZATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2012/147958
Kind Code:
A1
Abstract:
Provided are an imprinting device and pressurization device whereby the thickness of a stage can be reduced and the effects of thermal expansion around the stage can be reduced. An imprinting device for transferring the molding pattern of a mold (100) onto a molded article (200) comprises: a pressurization unit (5) having a pressurization chamber (51) for using a fluid to pressurize the mold (100) and the molded article (200); a stage (2) for supporting the mold (100) and the molded article (200) pressurized by the pressurization unit (5); a pressure adjustment unit (3) having a pressure adjustment chamber (31) for using a fluid to pressurize the stage (2), the pressure adjustment unit being provided to the side of the stage 2 facing the pressurization unit (5); a pressurizing means (6) for regulating the pressure of the fluid inside the pressurization chamber (51); and a pressure-regulating means (8) for regulating such that the pressure difference between the fluid of the pressure adjustment chamber (31) and the pressurization chamber (51) becomes smaller. The pressure-regulating means (8) comprises an interconnecting tube interconnecting the pressurization chamber and the pressure adjustment chamber.
Inventors:
KAWAGUCHI HIROSUKE (JP)
TANAKA SATORU (JP)
TANAKA SATORU (JP)
Application Number:
PCT/JP2012/061468
Publication Date:
November 01, 2012
Filing Date:
April 27, 2012
Export Citation:
Assignee:
SCIVAX CORP (JP)
KAWAGUCHI HIROSUKE (JP)
TANAKA SATORU (JP)
KAWAGUCHI HIROSUKE (JP)
TANAKA SATORU (JP)
International Classes:
B29C59/02; H01L21/027
Foreign References:
| JP2010506427A | 2010-02-25 | |||
| JP3833537B2 | 2006-10-11 | |||
| JP2008221706A | 2008-09-25 | |||
| JPH02289311A | 1990-11-29 | |||
| JP2007513509A | 2007-05-24 | |||
| JP3862216B2 | 2006-12-27 |
Attorney, Agent or Firm:
OKUDA Noritsugu (JP)
Okuda 律次 (JP)
Okuda 律次 (JP)
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Claims: