Title:
FLUID PROCESSING DEVICE AND FLUID PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2012/011411
Kind Code:
A1
Abstract:
[Problem] To provide a fluid processing device capable of processing with high levels of throughput while minimizing the number of nozzles for fluid chemicals when carrying out fluid processing on a substrate, horizontally retaining the substrate within a cup and supplying the fluid chemicals therewithin. [Solution] With reference to a developing process of the fluid process type, two types of developer nozzles are provided so as to be capable of supporting two types of development processing schemes. The developer nozzle that is employed in the scheme, from among the two schemes, which has the longer nozzle restraint time, is disposed separately for first fluid processing modules (1, 2), and the developer nozzle that is employed in the scheme that has the shorter nozzle restraint time is shared jointly with both of the modules (1, 2). The shared developer nozzle is configured to be on standby in an intermediate location between both of the modules (1, 2).
Inventors:
TAKIGUCHI Yasushi (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
滝口 靖史 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
YAMAMOTO Taro (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
山本 太郎 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
YAMAHATA Tsutomu (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
滝口 靖史 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
YAMAMOTO Taro (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
山本 太郎 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
YAMAHATA Tsutomu (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
Application Number:
JP2011/065869
Publication Date:
January 26, 2012
Filing Date:
July 12, 2011
Export Citation:
Assignee:
TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-ku Tokyo, 25, 〒1076325, JP)
東京エレクトロン株式会社 (〒25 東京都港区赤坂五丁目３番１号 Tokyo, 〒1076325, JP)
TAKIGUCHI Yasushi (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
滝口 靖史 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
YAMAMOTO Taro (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
山本 太郎 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
東京エレクトロン株式会社 (〒25 東京都港区赤坂五丁目３番１号 Tokyo, 〒1076325, JP)
TAKIGUCHI Yasushi (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
滝口 靖史 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
YAMAMOTO Taro (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
山本 太郎 (〒16 熊本県合志市福原１－１ 東京エレクトロン九州株式会社内 Kumamoto, 〒8611116, JP)
International Classes:
H01L21/027; B05C11/08; B05D1/26; B05D1/40; G03F7/30
Attorney, Agent or Firm:
KATSUNUMA Hirohito et al. (Kyowa Patent & Law Office, Room 323 Fuji Bldg., 2-3, Marunouchi 3-chome, Chiyoda-k, Tokyo 05, 〒1000005, JP)
Claims:
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