Title:
FLUID SENSOR
Document Type and Number:
WIPO Patent Application WO/2023/145568
Kind Code:
A1
Abstract:
The present invention provides a fluid sensor that has a low driving voltage and excellent detection precision. This fluid sensor comprises: a heat-generating resistor that generates heat when a current flows through a conductor in accordance with a driving voltage; and a temperature-detecting body that is provided around the heat-generating resistor and that detects the temperature in the vicinity of the heat-generating resistor, wherein the heat-generating resistor includes a heater part and a wiring resistor that is provided around the heater part and that connects to the heater part, the heater part has a fold-back structure in which the conductor is folded back a plurality of times, and the conductor width in the heater part along a direction that intersects the direction in which the current flows is less than the wiring width of the wiring resistor.
Inventors:
SUZUKI SATOSHI (JP)
YAMAMOTO YOTA (JP)
YAMAMOTO YOTA (JP)
Application Number:
PCT/JP2023/001311
Publication Date:
August 03, 2023
Filing Date:
January 18, 2023
Export Citation:
Assignee:
MINEBEA MITSUMI INC (JP)
International Classes:
G01F1/684; G01F1/696
Foreign References:
| JP2012073206A | 2012-04-12 | |||
| JP2006177972A | 2006-07-06 | |||
| JP2020143903A | 2020-09-10 | |||
| JP2004212103A | 2004-07-29 | |||
| JP2010223747A | 2010-10-07 | |||
| JP2013217731A | 2013-10-24 | |||
| JP2001050787A | 2001-02-23 | |||
| CN104482971A | 2015-04-01 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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