Title:
FLUID STORAGE AND DISPENSING SYSTEM
Document Type and Number:
WIPO Patent Application WO1999056057
Kind Code:
B1
Abstract:
A fluid storage and dispensing system (10) comprising a vessel (12) for holding a fluid (17) at a desired pressure. The vessel has a pressure regulator (26) set at a predetermined pressure. The regulator may be interiorly or exteriorly positioned, single-staged or multi-staged, and is associated with a port of the vessel. A dispensing assembly, e.g., including a flow control means such as a valve (20), is arranged in gas/vapor flow communication with the regulator (26), whereby the opening of the valve effects dispensing of gas/vapor from the vessel (12). The fluid in the vessel may be constituted by a liquid that is confined in the vessel at a pressure in excess of its liquefaction pressure at prevailing temperature conditions, e.g., ambient (room) temperature.
Inventors:
WANG LUPING (US)
TOM GLENN (US)
TOM GLENN (US)
Application Number:
PCT/US1999/009137
Publication Date:
December 29, 1999
Filing Date:
April 28, 1999
Export Citation:
Assignee:
ADVANCED TECH MATERIALS (US)
International Classes:
C23C14/24; C23C16/448; F17C1/00; F17C7/00; F17C7/02; F17C7/04; F17C9/02; F17C11/00; F17C13/00; F17C13/02; F17C13/04; H01L21/205; H01L21/265; H01L21/306; (IPC1-7): F17C7/04; F17C9/02
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