FLUID SUPPLY APPARATUS

Title:

FLUID SUPPLY APPARATUS

Document Type and Number:

WIPO Patent Application WO/1999/038057

Kind Code:

A1

Abstract:

A fluid supply apparatus comprising a pressure flow controller for controlling the rate of flow of fluid, a fluid selector valve for opening/closing the fluid passage on the secondary side, and a fluid supply controller for controlling the operation of them, wherein the pressure flow controller is provided with an orifice (5), a control valve (1) provided on the upstream side of the orifice (5), a pressure sensor (3) provided between the control valve (1) and the orifice (5), and an operation controller (6) for outputting to a driver (2) of the control valve (1) a control signal (Qy) representing the difference between a rate-of-flow signal (Qc=KP1) generated by calculation based on the pressure (P1) measured by the pressure sensor (3) and a rate-of-flow command signal (Qs), and the pressure (P1) on the upstream side of the orifice (5) is adjusted by opening/closing the control valve (1) so as to regulate the rate of flow on the downstream side of the orifice (5).

Inventors:

OHMI TADAHIRO (JP)
KAGAZUME TETU (JP)
SUGIYAMA KAZUHIKO (JP)
DOHI RYOUSUKE (JP)
MINAMI YUKIO (JP)
NISHINO KOUJI (JP)
KAWATA KOUJI (JP)
IKEDA NOBUKAZU (JP)
YAMAJI MICHIO (JP)

Application Number:

PCT/JP1999/000062

Publication Date:

July 29, 1999

Filing Date:

January 11, 1999

Export Citation:

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Assignee:

FUJIKIN KK (JP)
TOKYO ELECTRON LTD (JP)
OHMI TADAHIRO (JP)
KAGAZUME TETU (JP)
SUGIYAMA KAZUHIKO (JP)
DOHI RYOUSUKE (JP)
MINAMI YUKIO (JP)
NISHINO KOUJI (JP)
KAWATA KOUJI (JP)
IKEDA NOBUKAZU (JP)
YAMAJI MICHIO (JP)

International Classes:

C01B5/00; F16K31/06; G05D7/06; G05D11/13; G05D21/00; (IPC1-7): G05D7/06

Foreign References:

JPH1055218A	1998-02-24
JPH0994451A	1997-04-08
JPH08185229A	1996-07-16

Other References: