Title:
FLUID SUPPLY DEVICE AND FLUID SUPPLY METHOD
Document Type and Number:
WIPO Patent Application WO/2019/031301
Kind Code:
A1
Abstract:
[Problem] To provide a fluid supply device and a fluid supply method that make it possible to stably supply a supercritical fluid. [Solution] A fluid supply device 1 that: supplies a fluid that is in a pre–supercritical fluid transformation liquid state toward a processing chamber 500; and has a condenser 130 that condenses and liquefies gaseous carbon dioxide, a tank 140 that stores fluid that has been condensed and liquefied by the condenser 130, a pump 150 that pressure-feeds the liquefied carbon dioxide stored in the tank 140 toward the processing chamber 500, and a damper part 10 that is provided on a flow path 2 that communicates with a discharge side of the pump 150, and suppresses periodic fluctuations in the pressure of fluid discharged from the pump 150. The damper 10 has a spiral tube 20 that is fixed at either end in a prescribed position and transmits the fluid discharged from the pump 150.
Inventors:
YOSHIDA TOSHIHIDE (JP)
MINAMI YUKIO (JP)
SHINOHARA TSUTOMU (JP)
MINAMI YUKIO (JP)
SHINOHARA TSUTOMU (JP)
Application Number:
PCT/JP2018/028592
Publication Date:
February 14, 2019
Filing Date:
July 31, 2018
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
H01L21/304; H01L21/027
Foreign References:
| JP2013159499A | 2013-08-19 | |||
| JP2007500940A | 2007-01-18 | |||
| JP2003531478A | 2003-10-21 |
Attorney, Agent or Firm:
FUJIMOTO Kenji (JP)
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