FLUID SUPPLY DEVICE - KOYO THERMO SYS CO LTD

Title:

FLUID SUPPLY DEVICE

Document Type and Number:

WIPO Patent Application WO/2017/158854

Kind Code:

A1

Abstract:

Provided is a fluid supply device with which the allowable amount of rotation of each nozzle around a prescribed rotational axis can be further increased, and the load acting on piping can be further reduced. This fluid supply device 5 has: first piping 31A-31L connected to nozzles 11A-11C and 12F-12J; a rotation support unit 10 that supports the nozzles 11A-11C and 12F-12J and the first piping 31A-31L; second flexible piping 33A-33L; and a linear guide 15. One end 33a of the second flexible piping 33A-33L is configured so as to be capable of rotating in conjunction with each first piping 31A-31L around a rotational axis L1. A movable guide part 51 of the linear guide 15 is configured so as to be capable of linear displacement in accordance with deformation of each second flexible piping 33A-33L in conjunction with the rotation of each first piping 31A-31L.

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Inventors:

YAMAMOTO AKIHITO (JP)
SASAKI YASUHIRO (JP)

Application Number:

PCT/JP2016/063571

Publication Date:

September 21, 2017

Filing Date:

May 02, 2016

Export Citation:

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Assignee:

KOYO THERMO SYS CO LTD (JP)

International Classes:

F04B41/00; B29C70/06; F16J12/00

Domestic Patent References:

WO2013057753A1

2013-04-25

Foreign References:

JPH0621769U	1994-03-22
JPH11246029A	1999-09-14
JPS5712286U	1982-01-22
JP2010264718A	2010-11-25

Attorney, Agent or Firm:

ONEDEE IP PARTNERS (JP)

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