Title:
FLUID SUPPLY LINE AND OPERATION ANALYSIS SYSTEM
Document Type and Number:
WIPO Patent Application WO/2019/065047
Kind Code:
A1
Abstract:
[Problem] To accurately monitor the entirety of a fluid supply line constituted by a plurality of fluid control devices, and to suppress variations in the operation of each fluid control device so as to improve the accuracy of the fluid supply line. [Solution] A fluid supply line L1 comprises a plurality of fluid control devices F1, V11-V14 which communicate in a fluid tight manner, the fluid supply line including: a first connection means that connects a mechanism outside of the fluid supply line L1 to F1 and a flow rate control device in the fluid supply line L1; and a second connection means that branches from the first connection means in the fluid supply line L1 and that connects to other fluid control devices F1, V11-V14.
Inventors:
TANNO RYUTARO (JP)
AIKAWA KENJI (JP)
HARADA AKIHIRO (JP)
SUZUKI YUYA (JP)
MATSUDA TAKAHIRO (JP)
KOMEHANA KATSUNORI (JP)
OCHIISHI MASAHIKO (JP)
SHINOHARA TSUTOMU (JP)
AIKAWA KENJI (JP)
HARADA AKIHIRO (JP)
SUZUKI YUYA (JP)
MATSUDA TAKAHIRO (JP)
KOMEHANA KATSUNORI (JP)
OCHIISHI MASAHIKO (JP)
SHINOHARA TSUTOMU (JP)
Application Number:
PCT/JP2018/031753
Publication Date:
April 04, 2019
Filing Date:
August 28, 2018
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
G05D7/06; F16K37/00
Domestic Patent References:
| WO2017033757A1 | 2017-03-02 |
Foreign References:
| JP2003529218A | 2003-09-30 | |||
| JP2012033188A | 2012-02-16 | |||
| JP2008286812A | 2008-11-27 |
Attorney, Agent or Firm:
KASUKAWA Toshio (JP)
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