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Title:
FLUID SUPPLYING SYSTEM AND METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2012/075647
Kind Code:
A1
Abstract:
Disclosed is a fluid supplying system, which comprises at least two flow meters (1151, 1152) and a control device (130). The at least two flow meters are arranged on at least one water pipeline (112) and at least one washing solution pipeline (122) to generate several flow values. The control device (130) is electrically connected to the at least two flow meters (1151, 1152) for receiving the several flow values to determine the flow amount of the water and the washing solution supplied to at least one washing solution tank (100). A fluid supplying method using the fluid supplying system is also disclosed. The control device determines whether several water level sensors on the washing solution tank fall in failure according to the flow amount of the water and the washing solution so as to prevent the washing solution from flowing out of the washing solution tank when the sensors fall in failure, thus reducing the cost.

Inventors:
LIN, Yan-po (WANG, KexinSection B, G/F Comprehensive Building1, Huiye Science Park,Guanguang Rd., Tangjia Community, Gongming Office, Guangming New Distric, Shenzhen Guangdong 6, 518106, CN)
林彦伯 (中国广东省深圳市光明新区公明办事处塘家社区观光路汇业科技园综合楼1第一层B区王可心, Guangdong 6, 518106, CN)
Application Number:
CN2010/079707
Publication Date:
June 14, 2012
Filing Date:
December 13, 2010
Export Citation:
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Assignee:
SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD. (WANG, KexinSection B, G/F Comprehensive Building 1, Huiye Science Park,Guanguang Rd., Tangjia Community, Gongming Office, Guangming New Distric, Shenzhen Guangdong 6, 518106, CN)
深圳市华星光电技术有限公司 (中国广东省深圳市光明新区公明办事处塘家社区观光路汇业科技园综合楼1第一层B区王可心, Guangdong 6, 518106, CN)
LIN, Yan-po (WANG, KexinSection B, G/F Comprehensive Building1, Huiye Science Park,Guanguang Rd., Tangjia Community, Gongming Office, Guangming New Distric, Shenzhen Guangdong 6, 518106, CN)
International Classes:
B08B3/04; B08B3/00; H01L21/304
Attorney, Agent or Firm:
ESSEN PATENT & TRADEMARK AGENCY (WANG, KexinCyber Times Tower A, Room 1409,Tian'an Cyber Park, Futian Distric, Shenzhen Guangdong 0, 518040, CN)
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Claims: