Title:
FLUORESCENT INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/171142
Kind Code:
A1
Abstract:
The objective of the present invention is to perform inspections with a high throughput even if multiple LED elements having different colors are arranged on one substrate. Specifically, this fluorescent inspection device for performing inspection by causing LED elements arranged on a substrate to emit fluorescence, comprises a substrate holding unit, an exciting light emitting unit, an image capturing unit, a relative movement unit, an inspecting unit, and a control unit, wherein: the exciting light emitting unit comprises a first light source and a second light source; the image capturing unit comprises a first image capturing camera for capturing an inspection image including light having a fluorescence wavelength, emitted from an LED element that emits first wavelength light, and a second image capturing camera for capturing an inspection image including light having a fluorescence wavelength, emitted from an LED element that emits second wavelength light; and the control unit causes the first image capturing camera and the second image capturing camera to capture images alternately with image-capture timings thereof offset relative to one another, while causing the relative movement unit to move relatively in one direction, and with image capture by the first image capturing camera synchronized with light emission by the first light source and image capture by the second image capturing camera synchronized with light emission by the second light source.
Inventors:
MURATA HIROYUKI (JP)
Application Number:
PCT/JP2023/001403
Publication Date:
September 14, 2023
Filing Date:
January 18, 2023
Export Citation:
Assignee:
TORAY ENG CO LTD (JP)
TASMIT INC (JP)
TASMIT INC (JP)
International Classes:
G01N21/89
Foreign References:
| JP2014222221A | 2014-11-27 | |||
| JP2020085622A | 2020-06-04 | |||
| JP2002081908A | 2002-03-22 | |||
| JP2021048464A | 2021-03-25 | |||
| JP2000346612A | 2000-12-15 |
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