Title:
FLUORESCENT X-RAY DETECTION METHOD AND FLUORESCENT X-RAY DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2012/008513
Kind Code:
A1
Abstract:
A fluorescent X-ray detection method and a fluorescent X-ray detection device that enable the fluorescent X-ray analysis of a specified layer in a multilayer sample are provided. When a multilayer sample (3) is irradiated with X-rays and fluorescent X-rays are detected, the energy distribution of the X-rays and the glancing angle (θ) of the X-rays incident on the surface of the multilayer sample (3) are adjusted, thereby causing the X-rays to be incident on a layer to be measured in the multilayer sample (3) and sufficiently attenuating the X-rays incident on a layer not to be measured below the layer to be measured. Since the X-rays are more prone to be attenuated in the multilayer sample (3) as the energy thereof becomes smaller, a high energy component of the X-rays is removed by a monochromator (2). Further, since the path of the X-rays becomes longer and the X-rays are attenuated more as the glancing angle (θ) becomes smaller, the glancing angle (θ) is made smaller by an angle adjustment unit (5). Thus, the generation of fluorescent X-rays from the layer not to be measured is suppressed, thereby enabling analysis based on fluorescent-X-rays from the layer to be measured.
Inventors:
NISHIHAGI, Kazuo (2, Miyanohigashi-cho, Kisshoin, Minami-ku, Kyoto-sh, Kyoto 10, 〒6018510, JP)
西萩 一夫 (〒10 京都府京都市南区吉祥院宮の東町２番地 株式会社堀場製作所内 Kyoto, 〒6018510, JP)
NII, Hajime (2, Miyanohigashi-cho, Kisshoin, Minami-ku, Kyoto-sh, Kyoto 10, 〒6018510, JP)
西萩 一夫 (〒10 京都府京都市南区吉祥院宮の東町２番地 株式会社堀場製作所内 Kyoto, 〒6018510, JP)
NII, Hajime (2, Miyanohigashi-cho, Kisshoin, Minami-ku, Kyoto-sh, Kyoto 10, 〒6018510, JP)
Application Number:
JP2011/066046
Publication Date:
January 19, 2012
Filing Date:
July 14, 2011
Export Citation:
Assignee:
HORIBA, Ltd. (2 Miyanohigashi-cho, Kisshoin Minami-ku, Kyoto-sh, Kyoto 10, 〒6018510, JP)
株式会社堀場製作所 (〒10 京都府京都市南区吉祥院宮の東町２番地 Kyoto, 〒6018510, JP)
NISHIHAGI, Kazuo (2, Miyanohigashi-cho, Kisshoin, Minami-ku, Kyoto-sh, Kyoto 10, 〒6018510, JP)
西萩 一夫 (〒10 京都府京都市南区吉祥院宮の東町２番地 株式会社堀場製作所内 Kyoto, 〒6018510, JP)
株式会社堀場製作所 (〒10 京都府京都市南区吉祥院宮の東町２番地 Kyoto, 〒6018510, JP)
NISHIHAGI, Kazuo (2, Miyanohigashi-cho, Kisshoin, Minami-ku, Kyoto-sh, Kyoto 10, 〒6018510, JP)
西萩 一夫 (〒10 京都府京都市南区吉祥院宮の東町２番地 株式会社堀場製作所内 Kyoto, 〒6018510, JP)
International Classes:
G01N23/223
Attorney, Agent or Firm:
KOHNO, Takao (KOHNO PATENT OFFICE 4-3, Tsuriganecho 2-chome Chuo-k, Osaka-shi Osaka 35, 〒5400035, JP)
Claims: