Title:
FLUORINATED COMPOUND, LIVING POLYMERIZATION INITIATOR, FLUORINATED POLYMER, METHOD FOR PRODUCING FLUORINATED POLYMER, AND RESIST COMPOSITION
Document Type and Number:
WIPO Patent Application WO/2017/014145
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing: a fluorinated compound which can be produced easily and can be used suitably as a living radical polymerization initiator; and a fluorinated polymer which does not undergo the generation of contaminants, has excellent liquid repellency including water repellency, and can be used suitably as a leveling agent in a resist composition. The present invention provides a fluorinated compound represented by general formula (1) or (2) (wherein PFPE represents a poly(perfluoroalkylene ether) chain; X1's independently represent a monovalent organic group which has a secondary or tertiary carbon atom and also has a bromine or chlorine atom directly bonded to the secondary or tertiary carbon atoms; R1 and R2 independently represent an alkylene group having 1 to 4 carbon atoms; and R3 represents a fluorine atom or a perfluoroalkyl group having 1 to 4 carbon atoms).
Inventors:
SHIMIZU RYOHEI (JP)
TAKANO AKIRA (JP)
TAKANO AKIRA (JP)
Application Number:
PCT/JP2016/070827
Publication Date:
January 26, 2017
Filing Date:
July 14, 2016
Export Citation:
Assignee:
DAINIPPON INK & CHEMICALS (JP)
International Classes:
C07C69/63; C07C67/14; C08F4/40; C08F20/18; C08G65/332; C08G65/337
Foreign References:
| JP2013127611A | 2013-06-27 | |||
| JP2014181322A | 2014-09-29 | |||
| JP2014238557A | 2014-12-18 | |||
| JPH07118554A | 1995-05-09 | |||
| JP2010196044A | 2010-09-09 | |||
| JP2011184517A | 2011-09-22 |
Other References:
"Honeycomb Films from Perfluoropolyether-Based Star and Micelle Architectures", AUSTRALIAN JOURNAL OF CHEMISTRY, vol. 65, no. 8, 2012, pages 1186 - 1190, XP055348629
GENNA DOUGLAS T: "Preparation of fluorinated methacrylic copolymers by copper mediated living radical polymerization", TETRAHEDRON, vol. 58, no. 20, 2002, pages 4053 - 4059, XP004353783
DANIELLE MACORETTA: "Clear Antismudge Unimolecular Coatings of Diblock Copolymers on Glass Plates", ACS APPLIED MATERIALS & INTERFACES, vol. 6, no. 23, 2014, pages 21435 - 21445, XP055348645
GENNA DOUGLAS T: "Preparation of fluorinated methacrylic copolymers by copper mediated living radical polymerization", TETRAHEDRON, vol. 58, no. 20, 2002, pages 4053 - 4059, XP004353783
DANIELLE MACORETTA: "Clear Antismudge Unimolecular Coatings of Diblock Copolymers on Glass Plates", ACS APPLIED MATERIALS & INTERFACES, vol. 6, no. 23, 2014, pages 21435 - 21445, XP055348645
Attorney, Agent or Firm:
KONO Michihiro (JP)
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