Title:
FLUORINE-BASED GAS SENSING DEVICE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2018/080220
Kind Code:
A1
Abstract:
A fluorine-based gas sensing device is disclosed. The fluorine-based gas sensing device comprises: a substrate; and a sensing layer, which is disposed on the substrate, includes a hydrogenated transition metal oxide, and thus has a color changing when reacting with a fluorine-based gas. The fluorine-based gas sensing device can detect a fluorine-based gas through a color change of the sensing layer.
More Like This:
| WO/2005/012896 | CAPACITIVELY CONTROLLED FIELD EFFECT TRANSISTOR GAS SENSOR COMPRISING A HYDROPHOBIC LAYER |
| JP3306506 | ION SENSOR USING NONCYCLIC PEPTIDE |
| JPH01263550 | ION SENSOR |
Inventors:
SEO HYUNG TAK (KR)
SHIM GO WOON (KR)
LEE SANG YEON (KR)
SHIM GO WOON (KR)
LEE SANG YEON (KR)
Application Number:
PCT/KR2017/011972
Publication Date:
May 03, 2018
Filing Date:
October 27, 2017
Export Citation:
Assignee:
UNIV AJOU IND ACADEMIC COOP FOUND (KR)
International Classes:
G01N27/414; G01N21/78; H01L21/02
Foreign References:
| KR101519971B1 | 2015-05-15 | |||
| KR20130106032A | 2013-09-27 | |||
| KR20120061718A | 2012-06-13 | |||
| KR20100091695A | 2010-08-19 | |||
| KR101672143B1 | 2016-11-03 |
Other References:
SHIM, GO WOON ET AL.: "Detection of Fluorine Gas Using Reduced TiO2", MATERIALS RESEARCH SOCIETY OF KOREA FALL CONFERENCE AND THE 28TH ADVANCED MATERIAL SYMPOSIUM, 14 May 2015 (2015-05-14), pages 184
SHIM, GO WOON ET AL.: "HYDROGENATED PD DOPED TIO2 NANOHYBRlD FOR DETECTING FLUORINATED GAS", MATERIALS RESEARCH SOCIETY, 6 July 2016 (2016-07-06)
SHIM, GO WOON ET AL.: "HYDROGENATED PD DOPED TIO2 NANOHYBRlD FOR DETECTING FLUORINATED GAS", MATERIALS RESEARCH SOCIETY, 6 July 2016 (2016-07-06)
Attorney, Agent or Firm:
NAM, Gun Pil et al. (KR)
Download PDF: