FLUORINE-CONTAINING AROMATIC COMPOUND AND METHOD FOR PRODUCING SAME

WIPO Patent Application WO/2013/022015

A1

Disclosed are a fluorine-containing aromatic compound represented by general formula (1) and a method for producing the compound. In formula (1), R1 represents a hydroxyl group or an amino group; each of R2-R5 independently represents a hydrogen atom, a linear alkyl group having 1-4 carbon atoms or a branched chain alkyl group having 3 or 4 carbon atoms, and some or all of the hydrogen atoms in the alkyl group may be substituted by fluorine atoms; n represents an integer of 0-2; and each of m and n independently represents 0 or 1. Since this polymer derived from a fluorine-containing aromatic compound has a -C(CF3)2OH group at a position apart from the polymer main chain, this polymer is useful for the use as a resist.

NAKATSUJI JUNYA
MATSUURA MAKOTO
YAMANAKA KAZUHIRO

PCT/JP2012/070153

February 14, 2013

August 08, 2012

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CENTRAL GLASS CO LTD (JP)
NAKATSUJI JUNYA
MATSUURA MAKOTO
YAMANAKA KAZUHIRO

C07C39/24; C07C37/16; C07C37/20; C07C39/367; C07B61/00

WO2001002331A1

2001-01-11

JP2000191576A	2000-07-11
JP2010235502A	2010-10-21
JP2005070531A	2005-03-17
US3490894A	1970-01-20

KOBAYASHI,Y. ET AL.: "Studies on organic fluorine compounds. XLIII. The ene reaction of hexafluoroacetone", CHEMICAL & PHARMACEUTICAL BULLETIN, vol. 32, no. 12, 1984, pages 5031 - 5
URRY,W.H. ET AL.: "Multiple multicenter reactions of perfluoro ketones with olefins", JOURNAL OF ORGANIC CHEMISTRY, vol. 33, no. 6, 1968, pages 2302 - 10

KOBAYASHI, Hiromichi et al. (JP)
Hiromichi Kobayashi (JP)

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