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Title:
FLUORINE-CONTAINING ELASTOMER COMPOSITION
Document Type and Number:
WIPO Patent Application WO/2008/041557
Kind Code:
A1
Abstract:
Disclosed is a fluorine-containing elastomer composition composed of a fluorine-containing elastomer (A), a crosslinking agent (B) and a spherical silica (C). The fluorine-containing elastomer (A) is composed of a copolymer containing (a) tetrafluoroethylene, (b) a perfluoro(alkyl vinyl ether) or a perfluoro(alkoxyalkyl vinyl ether), and (c) a cyano group-containing perfluorovinyl ether. The spherical silica is a high-purity amorphous silica particle obtained by cooling vapor silicon oxide which is produced by firing a metal silicon powder. The fluorine-containing elastomer composition provides a sealing material excellent in workability, product appearance and plasma resistance by using a cyano group-containing perfluoroelastomer having excellent heat resistance and being added with only silica.

Inventors:
MAEDA MITSURU (JP)
YANAI YASUNORI (JP)
Application Number:
PCT/JP2007/068561
Publication Date:
April 10, 2008
Filing Date:
September 25, 2007
Export Citation:
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Assignee:
UNIMATEC CO LTD (JP)
MAEDA MITSURU (JP)
YANAI YASUNORI (JP)
International Classes:
C08L27/18; C08K3/36; C08K5/17; C08K5/29; C08L29/10
Domestic Patent References:
WO2000042100A12000-07-20
WO2001032782A12001-05-10
Foreign References:
JPH0931284A1997-02-04
JPH0931283A1997-02-04
JPH08119926A1996-05-14
JPH03170319A1991-07-23
JP2007126568A2007-05-24
JPH06302527A1994-10-28
JPH0761855B21995-07-05
JPH07102188B21995-11-08
Other References:
See also references of EP 2070982A4
Attorney, Agent or Firm:
YOSHIDA, Toshio et al. (No.401 Mirum Shiroganedai Bldg.,1-4, Kami-Osaki 1-chom, Shinagawa-ku Tokyo, JP)
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