FLUORINE-CONTAINING GREASE FOR SEMICONDUCTOR EQUIPMENT

Title:

FLUORINE-CONTAINING GREASE FOR SEMICONDUCTOR EQUIPMENT

Document Type and Number:

WIPO Patent Application WO/2020/071576

Kind Code:

A1

Abstract:

The present invention relates to a fluorine-containing grease for semiconductor equipment, and disclosed is a fluorine-containing grease for semiconductor equipment, at least comprising: 60-90 wt% of perfluoropolyether (PFPE)-M as a base oil; 10-40 wt% of polytetrafluoroethylene (PTFE) as a thickener; and 0.1-10 wt% of sulfurized bis(dibutylcarbamodithioato)di-μ-oxodioxodimolybdenum) as an additive.

Inventors:

CHOI IN SEOK (KR)
KIM GWANG SICK (KR)

Application Number:

PCT/KR2018/012693

Publication Date:

April 09, 2020

Filing Date:

October 25, 2018

Export Citation:

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Assignee:

CHOI IN SEOK (KR)

International Classes:

C10M169/06; C10M107/38; C10M119/02; C10M119/22; C10M151/04

Foreign References:

KR20140018369A	2014-02-12
US20100222244A1	2010-09-02
JP2018505250A	2018-02-22
JP4505954B2	2010-07-21
JP5073986B2	2012-11-14

Attorney, Agent or Firm:

LEE, Jong Il (KR)

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