Title:
FLUORINE-CONTAINING POLYMER
Document Type and Number:
WIPO Patent Application WO/2022/124183
Kind Code:
A1
Abstract:
Provided is a fluorine-containing polymer used for a film-forming solution with which it is possible to form a film that is less likely to produce a residue when immersed in a developer solution. This fluorine-containing polymer includes repeating units represented by formula (1) and repeating units represented by formula (2), the fluorine-containing polymer being characterized in that the contained amount of the repeating units represented by formula (2) is 1500 ppm or below by parts per million by mass based on the repeating units represented by formula (1). [Chemical 1] (In formulas (1) and (2): R1 and R2 independently represent a hydrogen atom, a methyl group, an ethyl group, an n-propyl group, an iso-propyl group, an n-butyl group, an iso-butyl group, a sec-butyl group, or a t-butyl group; R3 and R4 independently represent a hydrogen atom, a methyl group, or an ethyl group; R5 is a hydrogen atom or a trifluoromethyl group; and R6 is a hydrogen atom, a chlorine atom, a methyl group, or a trifluoromethyl group).
Inventors:
NADANO RYO (JP)
MIYAZAWA SATORU (JP)
KANEKO YUZURU (JP)
MIYAZAWA SATORU (JP)
KANEKO YUZURU (JP)
Application Number:
PCT/JP2021/044212
Publication Date:
June 16, 2022
Filing Date:
December 02, 2021
Export Citation:
Assignee:
CENTRAL GLASS CO LTD (JP)
International Classes:
C08F220/24
Foreign References:
| JP2020026410A | 2020-02-20 | |||
| JP2010001273A | 2010-01-07 |
Attorney, Agent or Firm:
YASUTOMI & ASSOCIATES (JP)
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