Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
FLUORINE-CONTAINING SULFONATES HAVING POLYMERIZABLE ANIONS AND MANUFACTURING METHOD THEREFOR, FLUORINE-CONTAINING RESINS, RESIST COMPOSITIONS, AND PATTERN-FORMING METHOD USING SAME
Document Type and Number:
WIPO Patent Application WO/2010/044372
Kind Code:
A1
Abstract:
Provided are polymerizable fluorine-containing sulfonic acid onium salts represented by formula (2) and polymers wherein same have been polymerized. By using the invented sulfonate resins, resist compositions of superior resolution, broad depth of focus allowance (DOF), small line edge roughness ("LER") and high sensitivity can be prepared. (In the formula, Z represents a substituted or unsubstituted 1‑6 carbon straight chain or branched alkylene group or a divalent group obtained by linking said alkylene groups in series with divalent groups obtained by eliminating two hydrogen atoms from an alicyclic or aromatic hydrocarbon. R represents a hydrogen atom, a halogen atom or a 1‑3 carbon alkyl group or a fluorine-containing alkyl group. Q+ represents a sulfonium cation or iodonium cation.)

Inventors:
MASUBUCHI TAKASHI
MORI KAZUNORI
HAGIWARA YUJI
NARIZUKA SATORU
MAEDA KAZUHIKO
Application Number:
PCT/JP2009/067567
Publication Date:
April 22, 2010
Filing Date:
October 08, 2009
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
CENTRAL GLASS CO LTD (JP)
MASUBUCHI TAKASHI
MORI KAZUNORI
HAGIWARA YUJI
NARIZUKA SATORU
MAEDA KAZUHIKO
International Classes:
C08F20/38; C07C303/32; C07C309/12; C07C381/12; G03F7/004; G03F7/038; G03F7/039; H01L21/027
Domestic Patent References:
WO2008056795A12008-05-15
WO2009038148A12009-03-26
Foreign References:
JP2006178317A2006-07-06
JP2009275155A2009-11-26
Attorney, Agent or Firm:
HASHIMOTO, Takeshi et al. (JP)
Hashimoto 剛 (JP)
Download PDF:
View/Download PDF      PDF Help



 
Previous Patent: INSULIN SECRETION STIMULATOR

Next Patent: LC FILTER AND HIGH-FREQUENCY SWITCH MODULE