Title:
FLUOROALKYLONIUM SALT TYPE CATION OR ACID GENERATOR GENERATING CATION OR ACID UPON IRRADIATION WITH ENERGY RAY
Document Type and Number:
WIPO Patent Application WO/2001/068575
Kind Code:
A1
Abstract:
A cation or acid generator which, upon irradiation with energy rays, can generate cations or an acid with high sensitivity and which is suitable for use in chemical amplification type resist materials. It comprises an energy-ray-sensitive fluoroalkylonium salt represented by the formula (1) in which R?1¿ to R?3¿ (each is alkyl, aryl, etc.) and R¿f? (fluoroalkyl) are bonded to the central element A (iodine, sulfur, selenium, tellurium, nitrogen, or phosphorus). Also provided is a chemical amplification type resist material which contains the acid generator.
Inventors:
ADACHI KENJI (JP)
ISHIHARA SUMI (JP)
ISHIHARA SUMI (JP)
Application Number:
PCT/JP2001/001060
Publication Date:
September 20, 2001
Filing Date:
February 15, 2001
Export Citation:
Assignee:
DAIKIN IND LTD (JP)
ADACHI KENJI (JP)
ISHIHARA SUMI (JP)
ADACHI KENJI (JP)
ISHIHARA SUMI (JP)
International Classes:
C07C19/16; C07C25/13; C07C211/64; C07C381/12; C07C391/00; C07C395/00; C07D211/76; C07D295/067; C07D309/30; C07D333/06; C07D333/46; C07D333/50; C07D333/54; C07D333/76; C07D335/06; C07D339/08; C07D345/00; C07F9/54; C07F9/59; C08K5/00; C08L101/00; C09K3/00; G03F7/004; G03F7/038; G03F7/039; H01L21/027; (IPC1-7): C07C25/02; C07C211/62; C07C381/12; C07C391/00; C07C395/00; C07F9/54; G03F7/004; H01L21/027
Foreign References:
| JPH10182824A | 1998-07-07 | |||
| JPH1152562A | 1999-02-26 | |||
| JPS612702A | 1986-01-08 | |||
| JPH11305440A | 1999-11-05 | |||
| GB2273927A | 1994-07-06 | |||
| EP0869393A1 | 1998-10-07 |
Attorney, Agent or Firm:
Asahina, Sohta (2-22 Tanimachi 2-chom, Chuo-ku Osaka-shi Osaka, JP)
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