FLUOROCOPOLYMER-CONTAINING CROSSLINKABLE COMPOSITION, CROSSLINKED OBJECT, AND SEALING MATERIAL FOR SEMICONDUCTOR PRODUCTION DEVICE

WIPO Patent Application WO/2017/086323

A1

Provided are: a fluorocopolymer-containing crosslinkable composition that has excellent crosslinkability and gives a crosslinked object which is inhibited from generating particles upon plasma irradiation; a crosslinked object obtained by crosslinking the composition; and a sealing material for semiconductor production devices which comprises the crosslinked object. The crosslinkable composition is characterized by comprising: a copolymer (X) which has iodine atoms and has constituent units based on tetrafluoroethylene and constituent units based on propylene and in which the content of constituent units based on vinylidene fluoride is less than 0.1 mol% with respect to all the constituent units; an organic peroxide; a crosslinking aid; and at least one compound selected from the group consisting of quaternary ammonium salts, quaternary phosphonium salts, and organic amines. The crosslinkable composition is further characterized by having a content of metallic elements of less than 1 part by mass per 100 parts by mass of the copolymer (X).

YASUDA SATOKO (JP)
NAGAI HIROKI (JP)
YAGI KEISUKE (JP)
KOSE TAKEHIRO (JP)
YAMADA TAKESHI (JP)

PCT/JP2016/083865

May 26, 2017

November 15, 2016

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ASAHI GLASS CO LTD (JP)

C08L27/18; C08F2/44; C08F8/00; C08F210/06; C08F214/24; C08J3/24; C08K5/14; C08K5/19; C08K5/49; C09K3/10

WO2010053056A1	2010-05-14
WO2012073977A1	2012-06-07

JP2007332216A	2007-12-27
JP2003526705A	2003-09-09
JP2003277445A	2003-10-02
JPH05155943A	1993-06-22
JP4720501B2	2011-07-13

See also references of EP 3378896A4

SENMYO, Kenji et al. (JP)

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