Title:
FOCUSING COMPENSATION METHOD AND DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/062941
Kind Code:
A1
Abstract:
Disclosed by the present invention are a focusing compensation method and device, the method comprising the following steps: (S11) providing an exposure machine lens group; (S12) providing an object to be tested, measuring a plurality of line widths of the object to be tested at a plurality of points in an axial direction of a plurality of line segments under a plurality of different focusing conditions, so as to obtain a plurality of measured values, and forming at least one line width curve according to the plurality of measured values; and (S13) correcting a focusing operation of the exposure machine lens group according to the at least one line width curve. According to the present invention, the line width of a product is measured and is fed back to an exposure machine so as to correct the focusing of the exposure machine, thereby improving the focusing precision of the exposure machine.
Inventors:
GUI YUCHANG (CN)
Application Number:
PCT/CN2019/091252
Publication Date:
April 02, 2020
Filing Date:
June 14, 2019
Export Citation:
Assignee:
WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO LTD (CN)
International Classes:
G03F7/20
Foreign References:
| CN108965735A | 2018-12-07 | |||
| CN208739260U | 2019-04-12 | |||
| CN103782238A | 2014-05-07 | |||
| US6509952B1 | 2003-01-21 | |||
| CN101561633A | 2009-10-21 | |||
| CN107367911A | 2017-11-21 | |||
| US5283141A | 1994-02-01 |
Attorney, Agent or Firm:
ESSEN PATENT & TRADEMARK AGENCY (CN)
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