Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
FOIL TRAP AND LIGHT SOURCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/118862
Kind Code:
A1
Abstract:
　Disclosed are a foil trap and a light source device that minimizes warping of a foil and reductions in the EUV transmittance of a foil trap caused by an increase in the size of the foil trap and lengthening of the foil. A truncated conical comb-like intermediate ring (6) having a center axis coaxial with the main axis of the foil trap (5) and having incisions (6a) in which a foil (5a) engages is attached to the foil trap (5), and the foil is supported by the intermediate ring (6) so as not to warp. The side surface of the truncated cone is configured so as to be parallel with EUV light from a high-temperature plasma (P) passing through the vicinity, so that the side surface does not block the EUV light. In addition, supporting the comb-like intermediate ring (6) using spokes connecting the outside ring (5c) and the center column (5b) of the foil trap (5) prevents the center axis of the comb-like intermediate ring (6) from becoming displaced from the center axis of the foil trap.

Inventors:
ESSER THORSTEN (DE)
LOOS NIELS (DE)
YABUTA HIRONOBU (JP)
Application Number:
PCT/JP2015/000497
Publication Date:
August 13, 2015
Filing Date:
February 04, 2015
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
H01L21/027; H05G2/00
Foreign References:
JP2006319328A2006-11-24
JP2010080593A2010-04-08
JP2004214656A2004-07-29
JP2009537981A2009-10-29
JP2012074388A2012-04-12
JP2009267407A2009-11-12
JP2008118158A2008-05-22
JP2006191061A2006-07-20
JP2013004369A2013-01-07
JP2007005542A2007-01-11
Attorney, Agent or Firm:
KONISHI, Kay et al. (JP)
Megumi Konishi (JP)
Download PDF:
View/Download PDF      PDF Help



 
Previous Patent: FUEL INJECTION VALVE

Next Patent: HIGH-STRENGTH HOT-ROLLED STEEL SHEET AND PRODUCTION METHOD THEREFOR