Title:
FORCE AND MOMENT DETECTOR USING RESISTOR
Document Type and Number:
WIPO Patent Application WO/1988/008521
Kind Code:
A1
Abstract:
The invention aims at measuring a force and the associated moment at a point of action (P) on a semiconductor substrate (110, 210) carrying on its surface resistor elements (r, R) whose resistance varies with the mechanical deformation thereof. Portions (112, 211) distant from the point of action are secured firmly. Since the semiconductor substrate includes an opening (113) or bridges (212 ~ 215), irregular strains appear in the substrate when a force toward a given direction or a rotation moment act on a point of action. The irregular strains cause resistor elements to change their resistances, and the changes are detected. The resistor elements are properly arranged on the semiconductor surface and form a given bridge circuit, the voltage across which is read to determine three-dimensional forces and rotation moments.
Inventors:
OKADA KAZUHIRO (JP)
Application Number:
PCT/JP1988/000394
Publication Date:
November 03, 1988
Filing Date:
April 22, 1988
Export Citation:
Assignee:
NEXY KENKYUSHO KK (JP)
International Classes:
G01L1/18; G01L5/16; (IPC1-7): G01L1/18; G01L5/16
Foreign References:
| JPS61223626A | 1986-10-04 | |||
| JPS465595A |
Other References:
See also references of EP 0311695A4
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