Title:
FORCE SENSOR
Document Type and Number:
WIPO Patent Application WO/2017/212618
Kind Code:
A1
Abstract:
A force sensor according to the present invention is provided with a support body disposed on an XY plane, a deformation body that is disposed so as to oppose the support body and has a deformation part that elastically deforms as a result of the application of a force to be detected, a fixed electrode disposed on the support body, a displacement electrode that is disposed on the deformation part of the deformation body so as to oppose the fixed electrode and composes a capacitive element with the fixed electrode, and a detection circuit for outputting an electrical signal indicating the applied force on the basis of the amount of variation in the capacitance value of the capacitive element. The capacitive element has a first capacitive element and second capacitive element, and the detection circuit determines whether the force sensor is functioning normally on the basis of a first electrical signal corresponding to the capacitance value of the first capacitive element, a second electrical signal corresponding to the capacitance value of the second capacitive element, and a combined electrical signal corresponding to the sum of the capacitance value of the first capacitive element and the capacitance value of the second capacitive element.
Inventors:
OKADA KAZUHIRO (JP)
OKADA MIHO (JP)
NISHIOKI NOBUHISA (JP)
OKADA MIHO (JP)
NISHIOKI NOBUHISA (JP)
Application Number:
PCT/JP2016/067277
Publication Date:
December 14, 2017
Filing Date:
June 09, 2016
Export Citation:
Assignee:
TRI-FORCE MAN CORPORATION (JP)
International Classes:
G01L5/16; G01L1/14
Foreign References:
| JP5853121B1 | 2016-02-09 | |||
| JP2008008688A | 2008-01-17 | |||
| JP2005326293A | 2005-11-24 |
Attorney, Agent or Firm:
NAGAI Hiroshi et al. (JP)
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