Title:
FORCE SENSOR
Document Type and Number:
WIPO Patent Application WO/2024/034019
Kind Code:
A1
Abstract:
This force sensor comprises: a first substrate, a second substrate and a third substrate that are arranged spaced apart in the plate thickness direction; a first connecting member that connects the first substrate and the second substrate so that the same are displaceable in the plate thickness direction; a second connecting member that connects the second substrate and the third substrate so that the same are displaceable in a direction orthogonal to the plate thickness direction; a first detection unit that detects relative displacement between the first substrate and the second substrate; and a second detection unit that is disposed in such a manner as to extend between the second substrate and the third substrate in the plate thickness direction, and that detects relative displacement between the second substrate and the third substrate. The second substrate has an area for mounting the second detection unit and an area other than the mounting area, where the area other than the mounting area protrudes toward the third substrate, forming a thick wall portion.
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Inventors:
ONODERA YUUSEI (JP)
Application Number:
PCT/JP2022/030472
Publication Date:
February 15, 2024
Filing Date:
August 09, 2022
Export Citation:
Assignee:
FANUC CORP (JP)
International Classes:
G01L5/165; G01L1/26
Foreign References:
| JP2019207120A | 2019-12-05 | |||
| JPH0862062A | 1996-03-08 | |||
| JP2005288705A | 2005-10-20 | |||
| US20110100129A1 | 2011-05-05 | |||
| JPH05346356A | 1993-12-27 |
Attorney, Agent or Firm:
UEDA, Kunio et al. (JP)
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