Title:
FORE-LINE PRECONDITIONING FOR VACUUM PUMPS
Document Type and Number:
WIPO Patent Application WO2006060275
Kind Code:
A3
Abstract:
The present invention is an apparatus and method for evacuating a number of vacuum processing chambers containing incompatible gases. The gases are directed to a subatmospheric abatement chamber containing preconditioning devices. The gases are treated in the abatement chamber to render them compatible. The compatible gases are then drawn from the abatement chamber as a single stream 6 through a backing pump.
Inventors:
BAILEY CHRISTOPHER M (GB)
BOGER MICHAEL S (US)
BOGER MICHAEL S (US)
Application Number:
PCT/US2005/042730
Publication Date:
August 17, 2006
Filing Date:
November 23, 2005
Export Citation:
Assignee:
BOC GROUP INC (US)
BAILEY CHRISTOPHER M (GB)
BOGER MICHAEL S (US)
BAILEY CHRISTOPHER M (GB)
BOGER MICHAEL S (US)
International Classes:
F04B25/00; F04B37/16; F04D19/04; F04D25/00; F04D25/16; H01L21/02
Foreign References:
| US4725204A | 1988-02-16 | |||
| US6635228B1 | 2003-10-21 | |||
| US4636401A | 1987-01-13 |
Other References:
See also references of EP 1817500A4
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