Title:
FOREIGN MATTER DETECTION DEVICE AND FOREIGN MATTER DETECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2017/126360
Kind Code:
A1
Abstract:
[Problem] To make it possible to accurately detect fine foreign matter flowing through a flow path part. [Solution] A foreign matter detection device configured so as to be provided with: a flow path part through which a fluid flows; a laser light irradiation unit that is provided with an optical system, which flattens laser light from a laser light source such that the laser light is longer in a direction intersecting with the flow direction of the fluid in the flow path part, that is provided such that the flow direction of the fluid in the flow path part and the optical path intersect, and that is for irradiating laser light into the flow path part; a light detection unit that is provided on the optical path of light that has passed through the flow path part and includes a plurality of light reception elements disposed along the longitudinal direction of a cross section of the light path; and a foreign matter detection unit for comparing the signal levels corresponding to the signal levels of the electrical signals corresponding to the intensities of the light received by each of the plurality of light reception elements and a prescribed signal level threshold and detecting foreign matter on the basis of the comparison result.
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Inventors:
HAYASHI MASATO (JP)
NOGUCHI KOHEI (JP)
KAJIWARA DAISUKE (JP)
HIGASHI KOUDAI (JP)
NOGUCHI KOHEI (JP)
KAJIWARA DAISUKE (JP)
HIGASHI KOUDAI (JP)
Application Number:
PCT/JP2017/000436
Publication Date:
July 27, 2017
Filing Date:
January 10, 2017
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
G01N15/14; G01N15/06; G01N21/47; G01N21/49; G01N15/02
Foreign References:
| JPH05215664A | 1993-08-24 | |||
| JPH05346390A | 1993-12-27 | |||
| JP2015194359A | 2015-11-05 | |||
| JPS61126448A | 1986-06-13 | |||
| JPS5537998A | 1980-03-17 | |||
| JPH0749302A | 1995-02-21 | |||
| JPH09196842A | 1997-07-31 | |||
| JP2002062249A | 2002-02-28 | |||
| JP2003130784A | 2003-05-08 |
Attorney, Agent or Firm:
INOUE, Toshio et al. (JP)
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