Title:
FOREIGN MATTER INSPECTION DEVICE AND FOREIGN MATTER INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2019/239501
Kind Code:
A1
Abstract:
[Problem] To increase the degree of precision to which foreign matter is detected when inspecting for foreign matter adhered to an object for inspection, by means of enlarging an effective inspection area. [Solution] A foreign matter inspection device (1) according to the present invention, which inspects for foreign matter adhered to a surface of an object for inspection (4), wherein said foreign matter inspection device (1) comprises: light source parts (3a, 3b) which irradiate illumination light (L) onto the object for inspection (4), said illumination light (L) being a complementary color to a surface color of the object for inspection (4); imaging parts (2a-2r) which image the object for inspection (4); and a detection part which detects the foreign matter on the basis of images imaged by the imaging parts (2a-2r).
Inventors:
SANO EIICHI (JP)
NAKAMURA MIZUKI (JP)
NAKAMURA MIZUKI (JP)
Application Number:
PCT/JP2018/022470
Publication Date:
December 19, 2019
Filing Date:
June 12, 2018
Export Citation:
Assignee:
FK OPT LABO CO LTD (JP)
International Classes:
G01N21/956; G01N21/94
Foreign References:
| JPH0426844A | 1992-01-30 | |||
| JP2007085964A | 2007-04-05 | |||
| JP2007040862A | 2007-02-15 | |||
| JP2012002661A | 2012-01-05 |
Attorney, Agent or Firm:
MINAMI Yoshiaki (JP)
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