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Patent Searching and Data


Title:
FOREIGN MATTER REMOVAL DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/204333
Kind Code:
A1
Abstract:
A foreign matter removal device (100) for removing foreign matter on a surface of a substrate (13) is provided with: a cuboidal cleaning head (20) which includes a slit (23) for spraying a band of air onto the surface of the substrate (13) being transferred in an X-direction, and a rectangular suction opening (24) disposed adjacent to the slit (23); and a drive unit (30) which moves the cleaning head (20) in a Y-direction along the surface of the substrate (13). A front surface (21a) of the cleaning head (20) is inclined by an angle θ1 from the Y-direction in a direction opposite to the transfer direction. In this way, the purity of the surface of a planar member being transferred is improved.

Inventors:
NAKAMURA, Tomonori (51-1 Inadaira 2-chome, Musashimurayama-sh, Tokyo 85, 〒2088585, JP)
OMATA, Hiroshi (51-1 Inadaira 2-chome, Musashimurayama-sh, Tokyo 85, 〒2088585, JP)
MAEDA, Toru (51-1 Inadaira 2-chome, Musashimurayama-sh, Tokyo 85, 〒2088585, JP)
NISHIO, Kensuke (51-1 Inadaira 2-chome, Musashimurayama-sh, Tokyo 85, 〒2088585, JP)
KOBAYASHI, Taito (51-1 Inadaira 2-chome, Musashimurayama-sh, Tokyo 85, 〒2088585, JP)
Application Number:
JP2017/019706
Publication Date:
November 30, 2017
Filing Date:
May 26, 2017
Export Citation:
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Assignee:
SHINKAWA LTD. (51-1, Inadaira 2-chome Musashimurayama-sh, Tokyo 85, 〒2088585, JP)
International Classes:
H01L21/304; B08B5/00; H01L21/677
Attorney, Agent or Firm:
YKI PATENT ATTORNEYS (1-34-12, Kichijoji-Honcho Musashino-sh, Tokyo 04, 〒1800004, JP)
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