Title:
FORMATION OF PIEZOELECTRIC DEVICES
Document Type and Number:
WIPO Patent Application WO/2019/166805
Kind Code:
A3
Abstract:
A method for producing an ultrasonic transducer or ultrasonic transducer array, the method comprising providing or depositing a layer of piezoelectric material on a substrate. The piezoelectric material is a doped, co-deposited or alloyed piezoelectric material. The piezoelectric material comprises: a doped, co-deposited or alloyed metal oxide or metal nitride, the metal oxide or metal nitride being doped, co-deposited or alloyed with vanadium or a compound thereof; or zinc oxide doped, co-deposited or alloyed with a transition metal or a compound thereof. Optionally, the deposition of the layer of piezoelectric material is by sputter coating, e.g.using a sputtering target that comprises a doped or alloyed piezoelectric material. In examples, the layer of piezoelectric material is deposited onto the substrate using high power impulse magnetron sputtering (HIPIMS). Further enhancement may be obtained using substrate biasing (e.g. DC and/or RF) during deposition of the layer of piezoelectric material. In further examples, the substrate is provided on a rotating drum whilst the layer of piezoelectric material is being deposited.
Inventors:
HUGHES DAVID (GB)
GIBSON DESMOND (GB)
IRVING DANIEL (GB)
GIBSON DESMOND (GB)
IRVING DANIEL (GB)
Application Number:
PCT/GB2019/050549
Publication Date:
October 03, 2019
Filing Date:
February 27, 2019
Export Citation:
Assignee:
NOVOSOUND LTD (GB)
International Classes:
H01L41/047; B06B1/06; H01L41/187; H01L41/316; H01L41/332
Foreign References:
| US4156050A | 1979-05-22 | |||
| JP2011080132A | 2011-04-21 | |||
| EP3216894A1 | 2017-09-13 | |||
| EP1396889A2 | 2004-03-10 |
Attorney, Agent or Firm:
MARKS & CLERK LLP (GB)
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