FORMATION OF A SMOOTH SURFACE ON AN OPTICAL COMPONENT

Title:

FORMATION OF A SMOOTH SURFACE ON AN OPTICAL COMPONENT

Document Type and Number:

WIPO Patent Application WO2002044763

Kind Code:

A3

Abstract:

A method for smoothing one or more surfaces on an optical component is disclosed. The method includes obtaining an optical component having one or more surfaces and performing a smoothing etch so as to smooth the one or more surfaces.

Inventors:

WU CHI (US)
YIN XIAOMING (US)
VELEBIR JAMES R JR (US)

Application Number:

PCT/US2001/030565

Publication Date:

April 17, 2003

Filing Date:

September 27, 2001

Export Citation:

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Assignee:

LIGHTCROSS INC (US)
WU CHI (US)
YIN XIAOMING (US)
VELEBIR JAMES R JR (US)

International Classes:

G02B6/125; G02B6/136; G02B6/12; (IPC1-7): G02B6/136; H01L21/306; H01L21/3065

Foreign References:

US6008128A	1999-12-28
DE19928570A1	1999-12-30

Other References:

JUAN W H ET AL: "Controlling sidewall smoothness for micromachined Si mirrors and lenses", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 14, no. 6, December 1996 (1996-12-01), pages 4080 - 4084, XP002200112, ISSN: 0734-211X
PATENT ABSTRACTS OF JAPAN vol. 013, no. 522 (E - 849) 21 November 1989 (1989-11-21)
PATENT ABSTRACTS OF JAPAN vol. 018, no. 545 (E - 1617) 18 October 1994 (1994-10-18)
PATENT ABSTRACTS OF JAPAN vol. 011, no. 152 (E - 507) 16 May 1987 (1987-05-16)
DATABASE WPI Section Ch Week 200140, Derwent World Patents Index; Class L03, AN 2001-014458, XP002226973

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