Title:
FRAME FEEDER
Document Type and Number:
WIPO Patent Application WO/2019/026916
Kind Code:
A1
Abstract:
This invention is provided with a heat plate (11) for heating the lower side of a substrate (75) sliding on the upper surface (11a) thereof, and a heat block (20) for heating the heat plate (11). The heat block (20) has an air heating channel (25) for heating air which has flowed in from the bottom surface (13b) side and causing the air to flow out on the heat plate (11) side. The heat plate (11) has air holes (12) for discharging air heated by the air heating channel (25) from the upper surface. The heated air discharged from the air holes (12) forms a heated air atmosphere (90) on the upper side of the heat plate (11), and a substrate (75) is transported through the heated air atmosphere (90). Curvature deformation of the substrate is thereby prevented.
Inventors:
NAGANO KAZUAKI (JP)
Application Number:
PCT/JP2018/028700
Publication Date:
February 07, 2019
Filing Date:
July 31, 2018
Export Citation:
Assignee:
SHINKAWA KK (JP)
International Classes:
H01L21/60; H01L21/52
Foreign References:
| JPH0252334U | 1990-04-16 | |||
| JPH1126493A | 1999-01-29 | |||
| JPS5423565U | 1979-02-16 |
Attorney, Agent or Firm:
YKI INTELLECTUAL PROPERTY ATTORNEYS (JP)
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