Title:
FRAME-INTEGRATED MASK MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/022661
Kind Code:
A1
Abstract:
The present invention relates to a frame-integrated mask manufacturing method. A frame-integrated mask manufacturing method, according to the present invention, integrates at least one mask (100) and a frame (200) for supporting the mask (100), and comprises the steps of: (a) providing the frame (200) having at least one mask cell region (CR); (b) raising (ET1) the temperature of a process region including the frame (200) to a first temperature; (c) allowing the mask (100) to correspond to the mask cell region (CR) of the frame (200); (d) lowering (ET2) the temperature of the process region including the frame (200) to a second temperature; (e) bonding at least a part of the edge of the mask (100) to the frame (200); and lowering (LT) the temperature of the process region including the frame (200) to a third temperature.
Inventors:
LEE BYUNG IL (KR)
Application Number:
PCT/KR2019/007992
Publication Date:
January 30, 2020
Filing Date:
July 02, 2019
Export Citation:
Assignee:
TGO TECH CORP (KR)
International Classes:
H01L51/56; H01L21/033; H01L51/00
Foreign References:
| JP2015127441A | 2015-07-09 | |||
| KR20150048368A | 2015-05-07 | |||
| JP2005105328A | 2005-04-21 | |||
| KR20150136043A | 2015-12-04 | |||
| JP2004335382A | 2004-11-25 |
Attorney, Agent or Firm:
KIM, Han (KR)
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