Title:
FREQUENCY-TUNABLE FILM BULK ACOUSTIC RESONATOR AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2022/134861
Kind Code:
A1
Abstract:
Disclosed are a frequency-tunable film bulk acoustic resonator and a preparation method therefor. The resonator comprises a substrate, an air gap, a sandwiched structure formed by electrodes and piezoelectric layers, and an electrode lead-out layer, wherein the substrate is connected to the sandwiched structure formed by the electrodes and the piezoelectric layers, and a connection face of the substrate and the sandwiched structure formed by the electrodes and the piezoelectric layers is recessed towards the inside of the substrate to form the air gap; and the electrode lead-out layer is connected to the sandwiched structure formed by the electrodes and the piezoelectric layers. The sandwiched structure formed by the electrodes and the piezoelectric layers comprises a bottom electrode, piezoelectric layers, an intermediate electrode and a top electrode, wherein the electrodes and the piezoelectric layers are alternately arranged to form the sandwiched structure, with the piezoelectric layers being stacked on the bottom electrode, the intermediate electrodes being covered by the piezoelectric layers, and the top electrode being stacked on the piezoelectric layers; and there are n piezoelectric layers and n intermediate electrodes, n is an integer, and n≥1. The resonance frequency multiplication of the resonator can be adjusted according to an applied bias voltage, and the resonator is applied to the field of 5G high-frequency communications.
Inventors:
LI GUOQIANG (CN)
ZHANG TIELIN (CN)
LIU HONGBIN (CN)
YI XINYAN (CN)
ZHAO LISHUAI (CN)
OUYANG PEIDONG (CN)
ZHANG TIELIN (CN)
LIU HONGBIN (CN)
YI XINYAN (CN)
ZHAO LISHUAI (CN)
OUYANG PEIDONG (CN)
Application Number:
PCT/CN2021/127795
Publication Date:
June 30, 2022
Filing Date:
October 31, 2021
Export Citation:
Assignee:
UNIV SOUTH CHINA TECH (CN)
International Classes:
H03H9/17; H03H3/02; H03H9/02
Foreign References:
| CN112543010A | 2021-03-23 | |||
| US20070176710A1 | 2007-08-02 | |||
| US20090273415A1 | 2009-11-05 | |||
| CN103166596A | 2013-06-19 |
Attorney, Agent or Firm:
YOGO PATENT & TRADEMARK AGENCY LIMITED COMPANY (CN)
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