Title:
FRONT-SIDE FILM LAYER STRUCTURE FOR IMPROVING CONVERSION EFFICIENCY OF PERC CELL, AND MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/148536
Kind Code:
A1
Abstract:
Disclosed is a front-side film layer structure for improving the conversion efficiency of a PERC cell, the structure comprising: a silicon wafer; a first silicon nitride film layer having a thickness of 10 ± 2nm and a refractive index of 2.67 ± 0.05; a second silicon nitride film layer having a thickness of 15 ± 2nm and a refractive index of 1.91 ± 0.05; a third silicon nitride film layer having a thickness of 5 ± 2nm and a refractive index of 1.33 ± 0.05; and a fourth silicon nitride film layer having a thickness of 50 ± 3nm and a refractive index of 0.86 ± 0.05. Also disclosed is a manufacturing method for manufacturing the front-side film layer structure and thus improving the conversion efficiency of a PERC cell, the method comprising the following steps: S1, pre-processing a silicon wafer; S2, manufacturing the first silicon nitride film layer; S3, manufacturing the second silicon nitride film layer; S4, manufacturing the third silicon nitride film layer; and S5, manufacturing the fourth silicon nitride film layer. The film layer structure of the present invention improves the shortwave response of cells and increases light absorption and the short-circuit current of cells, thereby enhancing photoelectric conversion efficiency of cells and lowering costs while increasing efficiency.
Inventors:
ZHANG PENG (CN)
HONG BUSHUANG (CN)
YANG LEI (CN)
WANG LAN (CN)
YAN TAO (CN)
HONG BUSHUANG (CN)
YANG LEI (CN)
WANG LAN (CN)
YAN TAO (CN)
Application Number:
PCT/CN2018/075971
Publication Date:
August 08, 2019
Filing Date:
February 09, 2018
Export Citation:
Assignee:
TONGWEI SOLAR ENERGY ANHUI CO LTD (CN)
International Classes:
H01L31/0216; H01L31/18
Domestic Patent References:
WO2017179223A1 | 2017-10-19 |
Foreign References:
CN207765454U | 2018-08-24 | |||
CN102361037A | 2012-02-22 | |||
CN106449783A | 2017-02-22 | |||
CN206259358U | 2017-06-16 |
Attorney, Agent or Firm:
KUNMING HEZHONG ZHIXIN INTELLECTUAL PROPERTY OFFICE (CN)
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