Title:
FULL FRAME THERMAL PUMP PROBE TECHNIQUE FOR DETECTING SUBSURFACE DEFECTS
Document Type and Number:
WIPO Patent Application WO2004090945
Kind Code:
A3
Abstract:
An area of a substrate is imaged by a camera (160) with and without heating (110), to obtain a hot image (192) and a cold image (193) respectively. The hot (192) and cold (193) images are compared by a computer (191) with one another form a differenctial image (194) to identify one or more locations as being defective, e.g. if the result of comparison at one location differs significantly relative to other locations. The comparison results in all locations form a differential image, and in several embodiments a number of differential images are obtained by repeatedly heating, imaging and comparing. In such embodiments, multiple differential images are averaged at each location, to improve the signal to noise ratio. Pump (110) and probe (140) lasers may be used for heating and for illumination respectively, or alternatively a single laser may be employed to generate both pump and probe beams.
Inventors:
SOME DANIEL I (IL)
Application Number:
PCT/US2004/009938
Publication Date:
May 19, 2005
Filing Date:
March 30, 2004
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
SOME DANIEL I (IL)
SOME DANIEL I (IL)
International Classes:
G01N25/72; (IPC1-7): G01N25/72
Foreign References:
| US5834661A | 1998-11-10 | |||
| US5292195A | 1994-03-08 | |||
| US5099363A | 1992-03-24 | |||
| US4679946A | 1987-07-14 |
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