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Title:
FULL-TEMPERATURE-RANGE SIMULATED ROTARY MOVING BED PRESSURE SWING ADSORPTION PROCESS FOR EXTRACTING H2 AND NH3 FROM GAN-MOCVD TAIL GAS
Document Type and Number:
WIPO Patent Application WO/2023/173767
Kind Code:
A1
Abstract:
A full-temperature-range simulated rotary moving bed pressure swing adsorption process for extracting H2 and NH3 from GaN-MOCVD tail gas, the process comprising a medium-high-temperature pressure swing adsorption ammonia concentration system and a medium gas pressure swing adsorption hydrogen extraction system, which are composed of a plurality of axial flow fixed bed adsorption towers and rotary speed mechanisms arranged in the centers of an upper multi-channel rotary valve and a lower multi-channel rotary valve and peripheries thereof mounted on a circular ring-shaped rotary tray; for a gas flowing through rotary valve channels, inlet and outlet end pipes of the adsorption towers, and adsorption bed layers, mass transfer in respective adsorption and desorption steps is completed at the positions of the inlet and outlet of each adsorption tower and at each adsorption bed layer while rotating, such that the simulated rotary moving bed pressure swing adsorption process is formed, a simulated rotary moving bed pressure swing adsorption process based on axial flow fixed bed pressure swing adsorption is realized, and H2 and NH3 products with high purity and high yield are obtained and returned to a GaN-MOCVD process for recycling.

Inventors:
ZHONG YALING (CN)
WANG LANHAI (CN)
CHEN YUN (CN)
TANG JINCAI (CN)
ZHONG YUMING (CN)
CAI YUEMING (CN)
Application Number:
PCT/CN2022/130758
Publication Date:
September 21, 2023
Filing Date:
November 09, 2022
Export Citation:
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Assignee:
ZHEJIANG TECHAIRS CLOUD TECH INC (CN)
International Classes:
C01B3/56; B01D53/08; C01C1/12
Foreign References:
CN114570162A2022-06-03
CN114588749A2022-06-07
CN114748980A2022-07-15
US20190366260A12019-12-05
CN108609583A2018-10-02
CN108658042A2018-10-16
CN108744882A2018-11-06
US20190366259A12019-12-05
US4705627A1987-11-10
US6063161A2000-05-16
US20180229177A12018-08-16
Attorney, Agent or Firm:
JIAXING QIFAN PATENT AGENCY (GENERAL PARTNERSHIP) (CN)
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